Multiwavelength Laser Ellipsometers

Features

• Improves modeling results using more measured data for complicated structures

Simpler and less complex than spectroscopic ellipsometers.

OPTIONAL LASERS  FOR STOKES ELLIPSOMETERS:
405 nm Laser Diode
544 nm HeNe Gas Laser
633 nm HeNe Gas Laser standard
830 nm Laser Diode

SINGLE LASER SUBSTITUTION Options

LS405    Substitutes 405 nm  Blue laser diode in place of standard 633 nm HeNe Gas Laser 
LS544    Substitutes 544 nm Green HeNe Gas laser in place of 633 nm HeNe Gas Laser  
LS830    Substitutes 830 nm laser diode in place of 633 nm HeNe Gas Laser 

ADD ADDITIONAL LASER FOR A 2 WAVELENGTH ELLIPSOMETER 

L2W405    Adds 405 nm Blue Laser Diode to 633 nm ellipsometer 
L2W544    Adds 544 nm Green HeNe Gas Laser to 633 nm ellipsometer 
L2W830    Adds 830 nm laser diode to 633 nm ellipsometer  

ADD TWO ADDITIONAL LASERS FOR A 3 WAVELENGTH ELLIPSOMETER  

L3W405.544   Adds 405 Laser Diode and 544 Green Gas Laser to 633 nm ellipsometer 
L3W405.830   Adds 405 Laser Diode and 830nm laser diode to 633 nm ellipsometer             
L3W544.830   Adds 544 Green Gas Laser and 830nm laser diode to 633 nm ellipsometer