Multiwavelength Laser Ellipsometers
廠牌:Gaertner Scientific Corporation
Features
• Improves modeling results using more measured data for complicated structures
Simpler and less complex than spectroscopic ellipsometers.
OPTIONAL LASERS FOR STOKES
ELLIPSOMETERS:
LS405 Substitutes
405 nm Blue laser diode in place of standard 633 nm HeNe Gas
Laser
ADD ADDITIONAL LASER FOR A 2
WAVELENGTH ELLIPSOMETER
L2W405 Adds 405
nm Blue Laser Diode to 633 nm ellipsometer
L3W405.544 Adds 405
Laser Diode and 544 Green Gas Laser to 633 nm
ellipsometer
405 nm Laser Diode
544 nm HeNe Gas Laser
633 nm HeNe Gas Laser standard
830 nm Laser Diode
SINGLE LASER SUBSTITUTION Options
LS544 Substitutes 544 nm Green HeNe Gas laser in place of 633
nm HeNe Gas Laser
LS830 Substitutes 830 nm laser diode in place of 633 nm HeNe
Gas Laser
L2W544 Adds 544 nm Green HeNe Gas Laser to 633 nm
ellipsometer
L2W830 Adds 830 nm laser diode to 633 nm ellipsometer
ADD TWO ADDITIONAL LASERS FOR A 3 WAVELENGTH ELLIPSOMETER
L3W405.830 Adds 405 Laser Diode and 830nm laser diode to 633 nm
ellipsometer
L3W544.830 Adds 544 Green Gas Laser and 830nm laser diode to 633 nm
ellipsometer