Motorized stage
Brand:PTT
型號 :
RAMap
Travel range: 76 X 25 mm2 (200 X 200 mm2 as required)
Repeatability < 1 um
Accuracy +/- 3 um
X, Y scan resolution: 0.05 um
1. XY motorized stage with the smallest 50 nm step size in XY direction controlled by software.
2. Z motorized stage with the smallest 2 nm step size in Z direction controlled by joystick or software. (as required)